Simple technique for replication of micro-optical elements
نویسندگان
چکیده
منابع مشابه
Micro-optical elements with arbitrary surfaces
We present a comparison of three different technologies for the fabrication of microoptical elements with arbitrary surfaces. We used direct laser writing, binary mask lithography in combination with reactive ion etching, and graytone lithography.
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ژورنال
عنوان ژورنال: Optical Engineering
سال: 1998
ISSN: 0091-3286
DOI: 10.1117/1.601799